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1

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Pathangi, Hari, Chan, Boon Teik, Bayana, Hareen, Vandenbroeck, Nadia, Heuvel, Dieter Van Den, Look, Lieve Van, Rincon-Delgadillo, Paulina, Cao, Yi, Kim, JiHoon, Lin, Guanyang, Parnell, Doni, Nafus, Ka

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2015

Language:

english

File:

PDF, 7.63 MB

english, 2015

2

Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations

Constantoudis, Vassilios, Papavieros, George, Gogolides, Evangelos, Pret, Alessandro Vaglio, Pathangi, Hari, Gronheid, Roel

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2017

Language:

english

File:

PDF, 4.24 MB

english, 2017

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Alternative Lithographic Technologies VII - Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Resnick, Douglas J., Bencher, Christopher, Pathangi, Hari, Chan, Boon Teik, Bayana, Hareen, Vandenbroeck, Nadia, Van Den Heuvel, Dieter, Van Look, Lieve, Rincon-Delgadillo, Paulina, Cao, Yi, Kim, JiHo

Year:

2015

Language:

english

File:

PDF, 2.80 MB

english, 2015

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Resnick, Douglas J., Bencher, Christopher, Gronheid, Roel, Rincon Delgadillo, Paulina, Pathangi, Hari, Van den Heuvel, Dieter, Parnell, Doni, Chan, Boon Teik, Lee, Yu-Tsung, Van Look, Lieve, Cao, Yi,

Year:

2014

Language:

english

File:

PDF, 1.25 MB

english, 2014

5

Chiral α-alkylation/arylation in 1-phenyl-2-(1-pyrrolidinyl)-1-propanol through Grignard reactions

Borkatte N. Hitesh Kumar, Velayudham Murugesan, Tangirala Prakasam, Pathangi S. Srinivasan, Devalla V. Ramana

Journal:

Tetrahedron: Asymmetry

Year:

2009

Language:

english

File:

PDF, 480 KB

english, 2009

6

Remarkable enantioselective α-amination in 1-phenyl-2-(n-alkylamino)-1-propanol

Borkatte N. Hitesh Kumar, Velayutham Murugesan, Tangirala Prakasam, Pathangi S. Srinivasan, Devalla V. Ramana

Journal:

Year:

2012

Language:

english

File:

PDF, 846 KB

english, 2012

7

Dielectrophoretic assembly of suspended single-walled carbon nanotubes

Pathangi, H., Groeseneken, G., Witvrouw, A.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 507 KB

english, 2012

8

Towards CMOS-compatible single-walled carbon nanotube resonators

Pathangi, H., Cherman, V., Khaled, A., Soree, B., Groeseneken, G., Witvrouw, A.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 440 KB

english, 2013

9

[IEEE 2008 International Conference on Signal Processing, Communications and Networking - Chennai, India (2008.01.4-2008.01.6)] 2008 International Conference on Signal Processing, Communications and Networking - Highly Resilient Network Elements

Janardhanan, Pathangi N, Sekar, Gnana Hari

Year:

2008

Language:

english

File:

PDF, 2.62 MB

english, 2008

10

Self-detecting gate-tunable nanotube paddle resonators

B. Witkamp, M. Poot, H. Pathangi, A. K. Hüttel, H. S. J. Van Der Zant

Year:

2008

Language:

english

File:

PDF, 722 KB

english, 2008

11

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Metrology, Inspection, and Process Control for Microlithography XXIX - The use of eDR-71xx for DSA defect review and automated classification

Cain, Jason P., Sanchez, Martha I., Pathangi, Hari, Van Den Heuvel, Dieter, Bayana, Hareen, Bouckou, Loemba, Brown, Jim, Parisi, Paolo, Gosain, Rohan

Year:

2015

Language:

english

File:

PDF, 1.85 MB

english, 2015

12

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Alternative Lithographic Technologies VIII - Improved cost-effectiveness of the block co-polymer anneal process for DSA

Bencher, Christopher, Cheng, Joy Y., Pathangi, Hari, Stokhof, Maarten, Knaepen, Werner, Vaid, Varun, Mallik, Arindam, Chan, Boon Teik, Vandenbroeck, Nadia, Maes, Jan Willem, Gronheid, Roel

Year:

2016

Language:

english

File:

PDF, 508 KB

english, 2016

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Alternative Lithographic Technologies VIII - Block co-polymer contributions to the defectivity and roughness performance of the 14nm half-pitch LiNe flow at IMEC

Bencher, Christopher, Cheng, Joy Y., Pathangi, Hari, Vaid, Varun, Chan, Boon Teik, Vandenbroeck, Nadia, Li, Jin, Cao, Yi, Durairaj, Baskaran, Lin, Guanyang, Somervell, Mark, Kitano, Takahiro, Harukawa

Year:

2016

Language:

english

File:

PDF, 1.08 MB

english, 2016

14

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Metrology, Inspection, and Process Control for Microlithography XXX - Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations

Sanchez, Martha I., Ukraintsev, Vladimir A., Constantoudis, Vassilios, Kuppuswamy, Vijaya-Kumar M., Gogolides, Evangelos, Pret, Alessandro V., Pathangi, Hari, Gronheid, Roel

Year:

2016

Language:

english

File:

PDF, 6.10 MB

english, 2016

15

Methoxsalen as an In vitro phenotyping tool in comparison with 1-Aminobenzotriazole

Palacharla, Raghava Choudary, Molgara, Parusharamulu, Pathangi, Hanumantha Rao, Boggavarapu, Rajesh kumar, Manoharan, Arunkumar, Ponnamaneni, Ranjith kumar, Ajjala, Devender Reddy, Nirogi, Ramakrishna

Journal:

Year:

2018

Language:

english

File:

PDF, 695 KB

english, 2018

16

Quantifying the Aggregation Factor in Carbon Nanotube Dispersions by Absorption Spectroscopy

Pathangi, Hari, Vereecken, Philippe M., Klekachev, Alexander, Groeseneken, Guido, Witvrouw, Ann

Journal:

Journal of Nanoscience

Year:

2014

Language:

english

File:

PDF, 2.80 MB

english, 2014

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